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Sensors and Materials, Vol. 24, No. 4 (2012) 205–220
MYU Tokyo
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S & M 0880 |
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Fabrication and Evaluation of Silicon Nanowire Photodetectors on Flexible
Substrate for Retinal Prosthetic System
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Sangmin Lee**, Suk Won Jung**,1, Sungil Park, Jaehyun Ahn, Seok June Hong, Hyung Jung Yoo, Min Ho Lee1 and Dong-il “Dan” Cho*
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ISRC/ASRI, Department of Electrical and Computer Engineering, Seoul National
University, Gwanak-ro 1, Gwanak-gu, Seoul 151-744, Republic of Korea
1Medical IT Convergence Research Center, Korea Electronics Technology Institute,
Yatap-dong, Bundang-gu, Seongnam 463-816, Republic of Korea
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(Received December 9, 2011; accepted February 13, 2012)
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Key words: silicon nanowire, photodetector, electrical stimulation, retinal prosthesis
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Retinal degenerative diseases result in a progressive degeneration of photoreceptors
in the retina and eventually lead to complete blindness. In this study,
we develop a novel silicon nanowire photodetector on a flexible substrate
to replace the function of photoreceptors on the retina and restore vision
for the blind. An extremely high surface-to-volume-ratio characteristic
of the nanowire enables the development of highly sensitive photonic sensors.
Therefore, a nanowire-based photodetector can be used as a stand-alone
retinal stimulation system without an external camera. The fabricated silicon
nanowire photodetector is measured to have an average photoresponsivity
of 1×104 A/W in a wide range of light intensities and wavelengths. Also,
the optical characteristics of the silicon nanowire photodetector are well
maintained on a flexible substrate, which is verified by comparing the
photosensitivity before and after the substrate transfer from a rigid form
to a flexible form. To evaluate the mechanical durability of the flexible
silicon nanowire photodetector, mechanical bending tests are performed.
The optical performance of the flexible photodetector is well preserved
during bending for 200 times. The presented performance evaluation results
show that the proposed nanowire-based photodetector can be used for the
implementation of the retinal prosthetic system. The results of this proposed
novel method can point the way to a revolutionary break-through in artificial
retina research.
*Corresponding author: Dong-il “Dan” Cho
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